Home > Precision Ceramics & Optical Components > Electrostatic Wafer Chuc

New TOTO's electrostatic wafer chucks are the result of many years in research and are accumulated know-how in advanced materials. It has been designed for use in highly advanced semiconductor manufacturing equipment. TOTO is known for its pioneering work in this field and, as a leading supplier, continues to meet the highest standards for excellence.

Principles and Characteristics
Application for Semiconductor Process
Application for Glass Substrate

Outline dimension less than 300mm thickness 4mm~10mm Chuck surface accuracy Flatness ≤ 3μm surface roughness Ra ≤ 0.25μm