Electrically Conductive Ceramics
ＴＯＴＯ's electrically conductive ceramics have been developed to prevent electric charge and damage to work.
Show a stable characteristic unlike the surface coating.
Sample : molded to have some ribs（450 x 300 x 55 mm）
- ■ Antielectrical discharge in tables and beams for high accuracy positioning system
- ■ Antielectrical discharge for measurement systems and inspections sytems
- ■ Flat Panel Display(LCD、PDP、OEL) : Tables and beams for positioning systems
Sample : guide for positioning stage
Sample : table for FPD substrate
|Material||Electrically Conductive Ceramics||Alumina Al2 O3 99.7%|
|1010 〜 1011||> 1014|
|Young's Modulus GPa||270||370|
|Bulk Density||3.65 〜 3.7||3.9|
(Young's Modulus /Bulk Density)
|73 〜 74||95|