ＴＯＴＯ's proprietary ceramic forming techniques enable the production of monolithic, hollow-structure ceramic components.
With their large size and high rigidity, ＴＯＴＯ's ceramic beams achieve reductions in overall equipment weight as well
as enhanced equipment throughput performance.
|Flat Plate||1,700 * 750 mm||High specific rigidity, High accuracy|
|Hollow Beam||3,800 mm in length||High specific rigidity, High accuracy, Light weight|
Ceramic beam's example
cross section example
(ＴＯＴＯ's material : AC270)
Fine grinding finish, Lapping finish also available
- ■ Flat Panel Display(LCD、PDP、OEL) : Guide axis for super precision positioning stage and movable table
- ■ Table for glass adsorption (chucks) for FPD substrate
- ■ Precision inspection, evaluation device associated components