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Characteristics
- It is high rigid and lightweight, high-specific-rigidity material.
- Hollow structure is available in long size. (over 2 meters in length, rib structure also available.)
- Coefficient of linear thermal expansion is low so that its change in shape due to change in temperature is minimized.
- High-precision-surface finishing available.
Use Application
- Tables and beams for high-precision positioning systems for semi-conductor manufacturing.
- Forks for conveyance systems
- Mirror holders and mirror bases
- Parts for high precision inspection systems and systems for valuation
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Comparison in properties
| materials |
Composition ceramics
Si-SiC |
Al2O3
(99.7%) |
SiC |
granite |
Young's modulus
Gpa |
362 |
373 |
402 |
60-100 |
| Bulk density |
3.0 |
3.9 |
3.1 |
2.9 |
Coefficient of linear thermal expansion
ppm/k |
2.3 |
4.5 |
4.0 |
5 |
Specific rigidity
(young's modulus / bulk density) |
121 |
96 |
130 |
20-35 |
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