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Ceramics Beams


TOTO CERAMICS are utilized for various purposes in the fields of semi-conductor and LCD manufacturings. We have gained achievements and reliability for its high performance particularly for ultra-high-precision processings, metrology, and inspection systems.
TOTO Ceramics for LCD have achieved top-of-the-world sizes by means of the TOTO original moldings.
For semiconductor-processings for which high precision and high throughput are demanded, TOTO will meet customers' demands with new materials.

STANDARD CERAMIC BEAMS

Application:processings and inspection systems for LCD
1500mm ceramic plate

Application:processings and inspection systems for LCD

Hi-Specific-Rigidity Material

Application:processings and conveyance systems for FPD
Low-Thermal-Expansion Material

Characteristics:zero-expansion material
Size:maximum 350mm

Application: mirrors for semiconductor processings and inspections
peripheral parts for semiconductor wafers and reticles
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