ＴＯＴＯ's electrostatic chucks (ESCs) contribute to state-of-the-art semiconductor manufacturing processes by achieving superior durability and low backside particle contamination because of our proven design and analysis capabilities, high-precision fabrication techniques and an integrated management system that is consistent from raw materials to finished products.
Principles and Features of adsorption power
■ Principles of adsorption power
・Strong adsorption power even when applying low voltage
・Adsorption power is not influenced by changes in process temperatures
■ Adsorption power of J-R and Coulombic ESC
Features of ＴＯＴＯ's ESC
■ Advantages of ＴＯＴＯ's ESC
- ＴＯＴＯ's high plasma resistant Al2 O3 materials achieve high durability.
Low backside particle contamination
ＴＯＴＯ can suggest any kind of preferred materials.
- ・Proposals of design
- Analysis capabilities (structural, thermal conductance, and thermal stress analysis)
- ・Mass-production manufacturing capability
- ＴＯＴＯ can achieve turnkey ESC (ceramic, heater, cooling jacket).
ＴＯＴＯ can meet the requirement of 450 mm ESC.
ＴＯＴＯ's ESC can control wafer temperature according to customer's requirement thanks to ＴＯＴＯ's materials, designing and mass-production manufacturing capabilities.
■ Example of plasma irradiation examination
ＴＯＴＯ's plasma resistant high purity Al2 O3
Typical high purity Al2 O3