Using AD, as well as yttria and alumina and barium titanate, a variety of oxides and composite oxide films can be formed .
TOTO's AD technology has developed a variety film coatings, each with unique material characteristics.
Applications
| Y2O3 film | Plasma resitant film |
| BaTiO3 film | Capacitor |
| Al2O3 film | Insulating film |
A variety of oxide and composite oxide films can be formed.
Thin layer for themal conductivity using Al2O3 film on a Cu-Mo alloy substrate
break down voltage
| Al2O3 film | ＞150V/μm |
| Y2O3 film | ＞250V/μm |
| BaTiO3 film | ＞60V/μm |
volume resistivity
| Al2O3 film | ＞1014Ω・cm |
| Y2O3 film | ＞1014Ω・cm |
| BaTiO3 film | 1012Ω・cm |
dieleｃｔｒｉｃ constant
| BaTiO3 film |
|
| as deposited | 78 |
| heat treatment(400℃) | 200 |
vickers hardness
| Al2O3 film | 800〜1350Hv |
| Y2O3 film | 770Hv |
| Other materials (reference) | |
| sintered Al2O3 | 1800Hv |
| Si wafer | 980Hv |
| glass | 530Hv |